July 15, 2008 – HEIDENHAIN presents the 1Dplus two-dimensional encoder that allows measurement of linear guiding and thermal drift errors during movements of a stage or machine, allowing the processing and immediate compensation of guiding and thermal drift errors. This results in a system with very high accuracies with jobs done right the first time. The most likely current applications include use in stacked stages, precise gantries, wafer processing, and in large flat panel display production and tests, though any motion stage user who wants to increase performance would benefit.
1Dplus encoders are frictionless and have gratings in two dimensions, with models featuring two or three scanning units for simultaneous measurement of both the X and Y directions. Three scanning units allow the calculation of the angle of rotation of the bracket that houses the scanning units. These orthogonal encoder graduations provide an exciting new dimension in precision as the encoder system measures left and right (X axis), the up-and-down (Y axis) motion is measured (and compensated for by the control) as well.
HEIDENHAIN’s early and current 1Dplus encoders are in use as the HEIDENHAIN interferential-type linear encoder, the LIF 400 with 1Dplus (see image). The measuring standard is DIADUR with a thermal expansion coefficient of 0 ppm/K. Current measuring length is 300 x 2 mm, with plans to increase that dramatically. The 1Dplus scale itself is 20 x 4.9 mm.
The X-axis measurement of the1Dplus has a current accuracy grade of ±1 µm and includes a reference mark. The grating period of the encoder is 8 µm; the signal period is 4 µm.
HEIDENHAIN CORPORATION is the North American subsidiary of DR. JOHANNES HEIDENHAIN GmbH, a leading international manufacturer of precision measurement and control equipment. Our product line includes linear scales, rotary and angular encoders, digital readouts, digital length gages, CNC controls and machine inspection equipment.
