Emerson Teams with MSP to Advance Traditional Semiconductor Processes | Automation.com

Emerson Teams with MSP to Advance Traditional Semiconductor Processes

July 142005
HATFIELD, PENNSYLVANIA (July 14, 2005) - Emerson Process Management has formed a strategic alliance with MSP Corporation to incorporate Brooks Instrument flow control technologies into the design of the MSP Model 2800 Turbo-Vaporizer™. The agreement also gives the Emerson Brooks’ sales channel exclusive distribution rights of the product in the United States and Japan. The alliance marries the advanced technologies of both firms, along with Brooks’ extensive channels, creating a product and sales partnership to deliver the resources needed by semiconductor fabs to break through new barriers.

The Model 2800 Turbo-Vaporizer is an enabling technology that has already demonstrated proven performance for depositing hafnium-based high-k dielectric films in commercial DRAM production. Two Brooks mass flow devices in the vaporizer make this capability possible.

This unique new vaporization system solves many of the quality and yield issues attributed to traditional liquid vaporizers used in CVD (chemical vapor deposition) and ALD (atomic layer deposition) semiconductor processes. The result is a high-performance solution that can be used to vaporize new precursors needed in the semiconductor industry to create advanced films.

The Model 2800 Turbo-Vaporizer is a direct liquid injection (DLI) vaporizer that uses fine droplet technology to vaporize temperature-sensitive liquid precursor chemicals. It virtually eliminates particulate formation when compared to conventional flash vaporizers, where precursor thermal decomposition leads to degraded film quality, contaminated wafers, loss of product yield, and unreliable vaporizer operation.

The MSP Turbo-Vaporizer uses a Brooks QUANTIM® Coriolis mass flow controller for precise delivery of precursor liquids and a Brooks thermal mass flow controller (MFC) for the carrier gas assist system. The Coriolis sensor at the heart of the QUANTIM flow controller measures fluid mass directly, independent of physical properties of the fluid, making it more versatile for use with a wide range of liquid precursors.

About MSP Corporation
MSP Corporation is a technology company using its unique expertise in particle science to develop measuring instruments and products for the semiconductor and pharmaceutical industries. MSP is noted for its innovative airborne particle measuring instruments and equipment products with advanced performance. Dr. Benjamin Liu, company founder, is a Regents’ Professor Emeritus at the University of Minnesota, and a member of the National Academy of Engineering. For more information, visit www.mspcorp.com, or contact [email protected]

About Emerson Process Management
Emerson Process Management (www.emersonprocess.com), an Emerson business, is a leader in helping businesses automate their production, processing and distribution in the chemical, oil and gas, refining, pulp and paper, power, food and beverage, pharmaceutical and other industries. A division of Emerson, Brooks Instrument (www.brooksinstrument.com) has supplied liquid and gas process control solutions to industries throughout the world. Brooks manufactures a complete line of flow measurement and control instrumentation including thermal mass, variable area, Coriolis, and positive displacement flowmeters, as well as a full line of supporting accessories. Brooks' technology and expertise play a key role in Emerson's combining of superior products and technology with industry-specific engineering, consulting, project management and maintenance services. Emerson's brands include PlantWeb®, Brooks®, Fisher®, Micro Motion®, Rosemount®, DeltaV™, Ovation® and AMS™ Suite.

About Emerson
Emerson (NYSE:EMR), based in St. Louis is a global leader in bringing technology and engineering together to provide innovative solutions to customers through its network power, process management, industrial automation, and appliance and tools businesses. Sales in fiscal 2004 were $15.64 billion. For more information, visit www.gotoemerson.com.

PlantWeb, Brooks, Fisher, Micro Motion, Rosemount, DeltaV, Ovation and AMS are marks of Emerson Process Management. All other marks are the property of their respective holders.
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