- July 31, 2014
July 31, 2014 – Posifa Microsystems released PVC 1000 MEMS Pirani Vacuum Sensors for HVAC and industrial applications. Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas. The heated element (measurement resistor) consists of a platinum thin-film resistor residing on a thermal insulating membrane. The membrane is suspended over a micro-machined cavity that is 25 μm in depth and has a bottom surface that is parallel to the membrane, ensuring precision measurement of heat transfer. Due to the minute volume of the gas measured (the volume within the cavity), the Posifa sensors deliver ultra-low power consumption and fast response time. The miniaturization of the Pirani technology using MEMS is emerging as an industry standard due to reliability, low cost, ease of use and ultra-low power consumption. Posifa’s PVC1000 series of MEMS Pirani Vacuum Sensors help customers leverage this trend to improve their existing products and to develop innovative new products. Featuring ultra-low power consumption of < 5 mW while maintaining fast response time of < 5m Sec., the devices are also shock resistance to 1,000g make them very suitable for gas volume as low as 0.1 cm3 Applications include:Analytical instruments, leak detection in any closed system maintained under primary vacuum, vacuum packing machines, portable digital vacuum gauges, small mechanical systems (e.g. pumping) to achieve specified vacuum levels and low cost vacuum switches to verify vacuum from 10 millitorr to 30 torr
Samples are available now in 4 lead TO-5 and 4 lead TO-46 metal can packages and can be ordered directly from the Posifa Microsystems. Since Pirani sensors often require unique packaging to accommodate the diverse applications into which they can be used. Posifa offers design services to customize the packaging of the sensors element, including the necessary cabling and connectors as specified by our customers. Pricing: 1,000 piece price for the TO-5 packaged device; PVC1001: $12.50 ea.