Physik Instrumente releases PIHera Z positioning stage | Automation.com

Physik Instrumente releases PIHera Z positioning stage

August 192015
Physik Instrumente releases PIHera Z positioning stage

August 19, 2015 -  Physik Instrumente releases PIHera Z flexure-guided piezo nanopositioning stage with travel ranges of 50 µm to 250 µm (400 µm open-loop).

Flexure guided piezo positioning stages provide vibrationless motion with virtually unlimited resolution and fast response. Due to the lack of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. PIHera precision closed-loop Z-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1nm, in a compact, FEA optimized package for high stiffness and long lifetime.

Positioning accuracy of 0.02% and optional vacuum compatibility make these compact stages ideal for applications that require frictionless, vibration-free, positioning with high linearity.

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