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Innovative Robotics Announces New Robot and Controller for Clean Environments

23 January, 2004
2 min read

Advanced System Offers Powerful, Intelligent Software, Significantly Higher Throughput, And Low Particulate Generation

San Jose, CA. Jan. 22, 2004. Innovative Robotic Solutions Inc. (IRSI), a Silicon Valley based, specialty robotics company, today announced their IR820 robot and controller.

The system is designed for automated processes that require exceptional accuracy, reliability, and ultra-cleanliness. The product is ideally suited for silicon wafer handling in semiconductor fabrication plants, as well as certain processes in the pharmaceutical and bio-tech industries, small flat panel applications, and hard disk production.The IR820 robot is the second generation of the IR800 line, which features four independent and coordinated axes, with a fifth axis optional. It is available with various arm lengths.

The four or more degrees of freedom and configurable reach allow it to manage a wide variety of tasks, including multiple in-line cassettes applications for 300 mm wafers.The IR820 distinguishes itself with an all new state-of-the-art servo amplifier and controller. Each of the robot’s three principle rotary joints has a 640-degree range of motion, allowing for flexibility of robot placement and very efficient trajectories. The robot has tested to the highest cleanliness standards.Software features include sophisticated trajectory planning and “streaming motion” that automatically blends programmed motions, yielding safe, smooth and fast throughput.

Blended motion commands can seamlessly integrate motion with application-specific I/O.Host program communication is supported through a high-level application program interface (API) via either RS232 serial communication or Ethernet TCP/IP. IRSI can also provide custom software to accommodate existing host programs written to other specifications.ATS Automation Tooling Systems Inc. will manufacture the IR820 robot and controller for IRSI.

IRSI previously announced that it had entered into a manufacturing agreement with ATS, a leading industrial automation company. The agreement secures for IRSI dependable and cost-effective robot manufacturing capacity at ISO 9001 facilities in the US, Europe and Asia. Klaus Woerner, ATS President and CEO, said, "We've worked with Innovative Robotics for a number of months now, both building their robots and developing prototype EFEM products, and are impressed with their capabilities. The company is a leader in their market segment and is on the cutting edge of clean semiconductor robot technology."

Pentagon Technologies Group, Inc., a leading provider of integrated “defects reduction” products for semiconductor fabrication, is a current user of the IR820. Don Lutz, Vice President of Pentagon Technologies said, “Innovative Robotics has been selected as Pentagon’s preferred robot supplier for our entry into the equipment front-end module (EFEM) market.

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Their IR820 series robot easily meets the cleanliness requirements for ISO Standard 14644-1 Class 2, making it an ideal product for next generation process and metrology tool applications that require ultra-clean, highly reliable, wafer handling automation.”Innovative Robotic Systems, Inc. is a designer, developer, and supplier of precision robotic equipment for semiconductor, biotech, and pharmaceutical industries. The company’s IR800 series material-handling robots combine innovative mechanical design with cutting edge, proprietary motion control software. Company Headquarters are located at 80 Las Colinas Lane, San Jose, CA 95119.

Phone: (408) 284-1723. Fax: (408) 284-1701.Email: [email protected] .

Web: www.innovativerobotics.com

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