Partnership with Asyst Technologies, Inc Demonstrates Value in Helping Equipment Suppliers Deliver Timely 300 mm Solutions
KITCHENER, Ontario-May 18, 2004 -The PEER Group Inc., today announced that it has successfully integrated equipment front-end module (EFEM) software into Solid State Measurements, Inc's (SSM) industry leading semiconductor materials characterization and process control equipment. As part of a partnership with Asyst Technologies, Inc (Nasdaq: ASYT), PEER Group incorporated Asyst's conX300(tm) equipment connectivity software to deliver a fully automated EFEM for SSM's FastGate 6000 series metrology system. The EFEM control system was integrated to meet SSM's initial customer specifications, but is designed to be flexible enough to handle any other customer's automation requirements with minimal configuration."
PEER Group has shown a clear understanding of our customer-driven objectives; it met our aggressive timeline and quality milestones with precision, and ahead of schedule," said Bill Alexander, vice president of engineering for SSM. "Outsourcing our EFEM automation has allowed us to focus on applying our engineering resources to improving the technical performance of our equipment, while relying on PEER Group engineers to address the complexity of customer-specific automation requirements. We look forward to an ongoing relationship, extending beyond this initial EFEM integration project." PEER Group and Asyst began their partnership in 2003 to speed the delivery of more flexible equipment connectivity and EFEM control software solutions.
The complexity of new standards and stringent automation requirements for 300 mm manufacturing have made the PEER Group/Asyst partnership an important resource for equipment vendors looking to quickly and cost-effectively ramp 300 mm tools. "We chose PEER Group as our connectivity and EFEM integration partner because of their reputation with both equipment and fab automation," commented Paula LuPriore, vice president and general manager of connectivity solutions at Asyst Technologies. "Working with the PEER Group we are able to provide our customers with a complete automation solution - hardware, software and software integration services. This partnership has proven to be a successful one, providing our customers with experienced, high quality systems, on time and within budget."
Asyst's conX300 is an industry-leading software application for automating 300 mm semiconductor wafer fabrication equipment. It implements the Semiconductor Equipment and Materials International's (SEMI) communications standards required for all 300 mm factory automation systems." Using a robust product like conX300 makes our integration job much easier," said Robert Harris, president of PEER Group. "Not only have we proven that we can deliver EFEM automation quickly, but we are confident our solutions will run reliably in production." PEER Group's EFEM automation services include integration of automation hardware components, carrier and wafer management, SECS/GEM communications, SEMI standards compliance, GUI development and testing to SEMATECH's 300 mm operational scenarios.
About Solid State Measurements
Solid State Measurements provides CV, IV and spreading resistance probing technologies for semiconductor manufacturing R&D and production. These are used in IC production for monitoring sub-2 nm gate oxides, high-k gate dielectrics, oxynitride gate stacks, low-k dielectrics, threshold adjust implants, epitaxial silicon, SiGe epitaxy, silicon-on-insulator (SOI), and other critical applications. Introduced in 2001, the SSM FastGate® technology provides nondestructive electrical monitoring in-line measurements of electrical oxide thickness, leakage current, implant dose, and other parameters. SSM is headquartered in Pittsburgh, Pennsylvania and has direct support facilities in China, Europe, Japan, Korea, Singapore, and Taiwan.
For more information, visit www.ssm-inc.com .
About Asyst Technologies
Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor and flat panel display (FPD) manufacturers to increase their manufacturing productivity and protect their investment in materials during the manufacturing process. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chip and FPD manufacturers, as well as original equipment manufacturers, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs.
Asyst's homepage is www.asyst.com .
About PEER Group
PEER Group is a global supplier of automation software services for the semiconductor, automotive and electronics industries. In the semiconductor industry, the company provides services to both wafer fab equipment suppliers and IC manufacturers for the implementation and global support of equipment automation, data collection, defect management, and advanced process control (APC) applications. PEER Group's distinctive competence is a highly refined and comprehensive specification, development, and delivery process.
For more information, visit www.peergroup.com .
