July 10, 2011 -Physik Instrumente released a high-precision version of its M-660 low profile rotary table. Driven by piezo motors which enable the very low profile of only 14 mm (0.6in), the new model is equipped with a high accuracy direct measuring encoder and provides 8 times the position resolution of the existing version.
The M-660 rotary table can accelerate to velocities of 720 degrees/sec. and its directly coupled precision optical encoder resolves positions down to 4 µrad (0.00023°), providing phase-lag-free, backlash-free feedback to the servo controller. Its self-clamping ceramic drive provides very high stability, with no energy consumption at rest and no heat generation.
Applications:
Semiconductor/ Test Equipment, Metrology, Optical Instrumentation
Features & Advantages
- Very Low Profile for Easy Integration: Only 14 mm (0.6”)
- Backlash-Free Direct Drive and Direct Metrology Optical Encoder
- 4 µrad Resolution (0.00023°)
- Max.
- Self-Locking Ceramic Direct Drive: Energy Saving & High Position Stability
- PILine Motor Principle is Non-Magnetic & Vacuum-Compatible
Velocity 720 °/s, Unlimited Travel Range
Mass and inertia were reduced significantly compared to conventional rotation stages, due to the light-weight direct-drive ceramic motor, operating without gears or magnets. The net result is very fast start/stop behavior, precise bidirectional speed and position control, which is critical for high speed motion contouring. These features make the M-660 outperform the stability, acceleration and settling speed of traditional servo motor direct drives and gear-driven mechanisms. A special motion controller for piezo motors is available to take full advantage of the specific motion characteristics of ultrasonic ceramic motors. USB interfacing and a solid software and driver package (LabView, Matlab, etc) for seamless integration are included.
