February 9, 2017 – Zygo Corporation announced the introduction of the ZPS absolute position measurement system with ultra-compact optical sensor technology. The ZPS system enables precision measurement and positional control for advanced applications, such as deformable optics, lens positioning systems, and fine stage control.
The ZPS system provides non-contact absolute position measurements on up to 64 synchronized channels. Key features include an optical sensor and hardware platform that delivers sensitivity, resolution and stability over a range of 1.2 mm. The optical sensor generates virtually no heat and is insensitive to electromagnetic interference, achieving measurement resolution of 0.01 nm with better than 1 nm/day measurement stability.
In addition, the ZPS system utilizes fiber optic cabling that allows for the use of a remote sensor location without impacting the measurement data. Optional accessories enable real- time automatic compensation for changes in ambient environmental conditions.
