June 30, 2016 – Applications in micro-assembly, beam guidance, photonics, and optical metrology all require nanometer adjustment precision, most times in very compact spaces. To meet those requirements, PI, a lead manufacturer of nanopositioning and motion control solutions, introduces its XY piezo motor positioners – P-620.2 to P-629.2 – to join the existing PIHera family of metrology stages
PIHera precision closed-loop XY-stages are equipped with absolute-measuring direct-metrology capacitance sensors and are designed to provide resolution down to 0.1nm, in a compact, FEA optimized package. Direct metrology provides higher stability and linearity compared to inferred metrology feedback – usually based on piezo resistive strain gauges, a technique also available from PI for entry level piezo nanopositioners. Positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages ideal for applications that require frictionless, vibration-free, positioning with high linearity.
Driven by PI’s PICMA piezo ceramics, PIHera piezo stages have properties especially important in long-term research and industrial applications, including temperature tolerance range of -20 to 80 C.
