February 27, 2008 - PI (Physik Instrumente) extended its PIHera family of compact X, XY and Z flexure-guided piezo nanopositioning tables, now offering travel ranges to 1.8 mm. Nanometer Precision for QA Applications, 50 to 1800 µm Travel Ranges These precision closed-loop flexure-guided stages can be used for scanning probe applications (surface metrology) and static positioning. Most PIHera stages provide sub-nanometer resolution and even the 1.8 mm versions achieve 3 nm resolution in closed-loop operation.
The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy Trajectory precision is in the low-nanometer range. High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators. The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera stages ideal for measuring and QA applications.
Capacitive Feedback Offers Greater Motion Linearity
The stages are equipped with non-contact capacitive sensors and reduce motion linearity errors to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
Typical Applications
Scanning Probe Microscopy, Biotechnology, Surface Metrology, Quality Assurance, Nanometrology, Interferometry, Nanopositioning, Semiconductor Technology
Features & Advantages
- No Wear & Tear: Flexures, Actuators and Sensors are Maintenance-Free
- Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
- Frictionless, Maintenance-Free, Precision Flexure Guiding System
- 50 to 1800 µm Travel Ranges
- X, XY, Z and XYZ Versions Available
- Closed-Loop Digital & Analog Control for up to 99.98 % Position Accuracy
- Vacuum-Compatible Versions
- Stiff and Compact Design for Millisecond Responsiveness
- Resolution <1 nm
- Capacitive Direct-Metrology Sensors for Faster Servo ResponseFlexible Controllers and Software: High Speed, Digital and Analog ControlA variety of ultra-low-noise controllers with both digital and analog input provide fast communications and come with a wide selection of software tools.
